发明名称 GROWTH OF A UNIFORMLY DOPED SILICON INGOT BY DOPING ONLY THE INITIAL CHARGE
摘要 <p>The present invention relates to a method of growing a silicon ingot comprising a dopant material having a segregation coefficient of k, wherein the concentration of the dopant is axially substantially uniform throughout the ingot. The method comprises the steps of providing a crucible having an inner growth zone in fluid communication with an outer feed zone, and the inner growth zone and the outer feed zone have cross-sectional areas that are can be used to determine conditions for maintaining dopant uniformity for the specific dopant material used. A crystalline growth system for growing at least one uniformly doped silicon ingot is also disclosed.</p>
申请公布号 WO2012154551(A2) 申请公布日期 2012.11.15
申请号 WO2012US36497 申请日期 2012.05.04
申请人 GT ADVANCED CZ, LLC;JOHNSON, BAYARD, K. 发明人 JOHNSON, BAYARD, K.
分类号 C30B15/04;C30B29/06;H01L21/02 主分类号 C30B15/04
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