| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain an alkali-free glass suitable for TFT/LCD, particularly for a-Si/TFT-LCD, which can satisfy various requirements, has a coefficient of thermal expansion which reduces thermal stress and is determined in consideration of the productivity of glass and consistency with various membrane materials, and has suitable viscosity characteristics for producing a large glass substrate, and to obtain an alkali-free glass substrate using the same. <P>SOLUTION: The alkali-free glass comprises, in mass% as the glass composition, 45-68% of SiO<SB>2</SB>, 12-18% of Al<SB>2</SB>O<SB>3</SB>, 5-15% of B<SB>2</SB>O<SB>3</SB>, 0-3% of MgO, 6-20% of CaO, 5-20% of SrO, 0 to less than 5% of BaO, 0-20% of ZnO, 0-5% of ZrO<SB>2</SB>, 0-5% of TiO<SB>2</SB>, and 0-5% of P<SB>2</SB>O<SB>5</SB>, and comprises substantially no alkali metal oxide. <P>COPYRIGHT: (C)2008,JPO&INPIT |
