| 摘要 |
PURPOSE: A gas sensor for detecting an insulating gas is provided to improve a reaction speed and recovery speed, to enhance the selectivity with respect to a detection target gas, and to improve the life time and stability of a gas sensor according to the need because the formation of a metallic carbon nano tube is selectively excluded. CONSTITUTION: A gas sensor for detecting an insulating gas comprises a substrate(10), a first electrode(16), a second electrode(18), and a carbon nano tube detecting member(24). The first and second electrodes are arranged on the substrate to be insulated by being spaced from each other. The first and second electrodes are formed so that sub electrodes projected to mutual directions are cross-arranged. The carbon nano tube detecting member is formed on top surfaces of the first and second electrodes by an electropherotyping or a dielectrophoresis.
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