| 摘要 |
PURPOSE: A substrate attaching device is provided to efficiently prevent damage to a film by forming an attaching unit near the upper side of the film to suppress the expansion of the film. CONSTITUTION: A substrate(40) is received in a bottom plate(10). The bottom plate includes a bottom base(11), a bottom tube(12), and a bottom pump(13). A top plate(20) vertically moves and is received in the bottom plate. An attaching unit(30) is mounted on a top plate and is located near the upper side of a film(50) to prevent the film from being expanded.
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