发明名称 Substrate processing system and data retrieval method
摘要 An operation terminal, which includes an operation terminal, when connected to a group administration apparatus for administering a plurality of substrate processing apparatuses for processing substrates, generates a data acquisition request format that sets forth retrieval conditions and types of display items classified in individual tables for the substrate processing apparatuses, and then transmits it to the group administration apparatus.
申请公布号 US8312333(B2) 申请公布日期 2012.11.13
申请号 US20110929229 申请日期 2011.01.10
申请人 KOSHIMAKI TOSHIRO;HITACHI KOKUSAI ELECTRIC INC. 发明人 KOSHIMAKI TOSHIRO
分类号 G01R31/28;G06F17/30 主分类号 G01R31/28
代理机构 代理人
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