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发明名称
METHOD FOR FORMING PATTERNS OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR101200938(B1)
申请公布日期
2012.11.13
申请号
KR20050092329
申请日期
2005.09.30
申请人
发明人
分类号
H01L21/027;H01L21/312
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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