| 摘要 |
PURPOSE: A gate-focusing electrode integrated electrode structure is provided to mold an electron beam by differently controlling compression ratio using an opening structure of a focusing electrode. CONSTITUTION: A nano emitter(210) is comprised of nanostructure material emitting an electron. A grid electrode(220) is separated from the nano emitter. The grid electrode extracts a part of the electron or the entire of the electron which is emitted from the nano emitter. An adjusting device is combined with a part of the grid electrode. The adjusting device focuses electron beam formed by the electron. A focusing electrode(230) comprises the adjusting device.
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