| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve pixel location accuracy and array inspection accuracy by accurately calculating a coordinate position in an end part of the region to be inspected on a scan image. <P>SOLUTION: An array inspection device detects an end part of an outer periphery of the region to be inspected (panel region) on a scan image, identifies the region to be inspected on the basis of this end part, and performs array inspection of the region to be inspected. By identifying the region to be inspected on the basis of the end part of the outer periphery of the region to be inspected (panel region), the array inspection device can reduce influence by displacement caused by image distortion or an image spot as compared to when a reference point of the region to be inspected is determined based on a shape of a corner part of the region to be inspected. In an aspect, the array inspection device includes an end part detection section which detects at least one end part of an outer peripheral part of the region to be inspected on a substrate from the scan image and identifies an inspection position in the region to be inspected on the scan image on the basis of the coordinate position of an end part detected by the end part detection section. <P>COPYRIGHT: (C)2013,JPO&INPIT |
