| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electric resistance type particulate matter detection sensor having high sensor sensitivity, which allows PM to be promptly deposited between a pair of detection electrodes on the surface of the sensor, with a smaller distance between the pair of detection electrodes. <P>SOLUTION: Detection electrodes EL<SB POS="POST">11</SB>and EL<SB POS="POST">12</SB>formed of a conductive material each having an approximately flat film shape are embedded and held inside an insulating substrate 100 in a parallel arranged state at predetermined intervals. End parts 11 and 12 of the electrodes are drawn out at least to a side end face 10 of the insulating substrate 100, so as to form a detection surface tilted from a reference plane perpendicular to plane parts of the detection electrodes EL<SB POS="POST">11</SB>and EL<SB POS="POST">12</SB>embedded inside the insulating substrate 100 at a predetermined inclined surface forming angle θ. <P>COPYRIGHT: (C)2013,JPO&INPIT |
