| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser illumination device capable of reducing illumination unevenness caused by an interference fringe of transmitted light of a fly-eye lens. <P>SOLUTION: In a laser illumination device, fly-eye lenses 2(4) and a condenser lens 32 are disposed on an optical path of a pulse laser beam 11 emitted from a light source 1, and between the light source 1 and the fly-eye lenses 2(4) or the fly-eye lenses 2(4) and the condenser lens 32, an electro-optic crystal element 5 is disposed which continuously changes a deflection direction of the pulse laser beam 14 with respect to an incident light beam and transmits the pulse laser beam 14. The electro-optic crystal element 5 is constituted of, for example, a pair of electrodes and an optical crystal material disposed between the electrodes, and a refractive index of the electro-optic crystal element is changed by applying voltage between the electrodes and generating an electric field. <P>COPYRIGHT: (C)2013,JPO&INPIT |
