| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a downsized oscillator with a PLL circuit. <P>SOLUTION: An oscillator 100 includes: a reference oscillation circuit which includes a first MEMS vibrator 12 disposed above a substrate 110, and outputs a first oscillation signal; a voltage control oscillation circuit which includes a second MEMS vibrator 52 disposed above the substrate 110, and outputs a second oscillation signal whose oscillation frequency is controlled by a control signal; a frequency division circuit that outputs a frequency division signal by dividing the second oscillation signal; and a phase comparison circuit that outputs the control signal on the basis of a phase difference between the frequency division signal and the first oscillation signal. Each of the first MEMS vibrator 12 and the second MEMS vibrator 52 includes a first electrode and a second electrode. The second electrode includes a movable part disposed opposite the first electrode. The area of the movable part of the first MEMS vibrator 12 is larger than the area of the movable part of the second MEMS vibrator 52 in a plan view of the substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
