EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING DISPLAY PANEL SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To uniformize a lifetime of each semiconductor light-emitting element while keeping intensity of exposure light constant when the exposure light is formed by using a plurality of semiconductor light-emitting elements.

SOLUTION: Intensity of exposure light irradiated from an exposure light irradiating device 30 is detected while temperature of each semiconductor light-emitting element 42 is detected. On the basis of teh detecting result of the temperature of each of the semiconductor light-emitting elements 42, lighting time of the semiconductor light-emitting elements of which the temperature is lower than a predetermined temperature or a predetermined temperature range is made to be longer than the lighting time of the semiconductor light-emitting elements of which the temperature is higher than the predetermined temperature or the predetermined temperature range, or driving current of the semiconductor light-emitting elements of which the temperature is lower than the predetermined temperature or the predetermined temperature range is made to be larger than the driving current of the semiconductor light-emitting element of which the temperature is higher than the predetermined temperature or the predetermined temperature range.

COPYRIGHT: (C)2013,JPO&INPIT