| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce a dispersion in the mechanical characteristics of vibration films in an electromechanical conversion device. <P>SOLUTION: A method for manufacturing an electromechanical conversion device of the present invention includes: a process for forming an insulation film on a first electrode; a process for forming a sacrificial layer on the insulation film; a process for forming a first membrane on the sacrificial layer; a process for forming a second electrode on the first membrane; a process for forming an etching hole in the first membrane and removing the sacrificial layer via the etching hole; a process for forming a second membrane on the second electrode; and a process for sealing the etching hole. The process for forming the second membrane is the process being the same as the process for forming the etching hole. <P>COPYRIGHT: (C)2013,JPO&INPIT |
