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发明名称
METHOD FOR MEASURING IMPURITY DISTRIBUTION IN SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH10223493(A)
申请公布日期
1998.08.21
申请号
JP19970024701
申请日期
1997.02.07
申请人
MATSUSHITA ELECTRON CORP
发明人
OHARA KANJI
分类号
G01N27/00;G01N27/22;H01L21/00;H01L21/22;H01L21/66;H01L29/00;(IPC1-7):H01L21/00
主分类号
G01N27/00
代理机构
代理人
主权项
地址
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