| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce cutting power of an electric fuse by blocking heat radiation from a resistor which is a heating element to an anode region whose heat capacity is large and by efficiently consuming Joule heat by the resistor. <P>SOLUTION: A polysilicon layer 6 is formed on an insulating film 5 and an insulating film mask is formed on a part of the polysilicon layer 6. Next, a silicide layer 7 is formed on the polysilicon layer 6 other than the region covered by the insulating film mask layer. Then, the silicide layer 7 and the polysilicon layer 6 are etched through a photo-etching step, and an electric fuse composed of an anode region 1, a cathode region 2, and a link region 3 which connects the anode region 1 and the cathode region 2 is formed. The electric fuse includes a non-silicide region extending in a part of the anode region 1 from a link region 3 direction across a boundary between the anode region 1 and the link region 3. The non-silicide region of the link region 3 constitutes a high resistance region 11 and the non-silicide region of the anode region 1 constitutes a heat conduction inhibition layer 1b. <P>COPYRIGHT: (C)2013,JPO&INPIT |
