Polishing Head for Semiconductor Wafer, Polishing Apparatus and Polishing Method,申请号KR20077020768-传众专利搜索

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发明名称	Polishing Head for Semiconductor Wafer, Polishing Apparatus and Polishing Method
摘要
申请公布号	KR101199888(B1)	申请公布日期	2012.11.09
申请号	KR20077020768	申请日期	2006.03.01
申请人		发明人
分类号	H01L21/304;B24B37/00;B24B37/005;B24B37/04;B24B37/30;B24B53/017	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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