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发明名称
METHOD FOR FORMING SILICIDE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR101199437(B1)
申请公布日期
2012.11.09
申请号
KR20050036340
申请日期
2005.04.29
申请人
发明人
分类号
H01L21/336;H01L21/24
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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