摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a polycrystalline silicon sintered body having a low residual oxygen concentration. <P>SOLUTION: The method for producing a polycrystalline silicon sintered body includes, e.g., a first step of obtaining a molded body by molding a silicon powder and a second step of putting the molded body in a heating device. The first and the second steps are carried out in a non-oxidizing gas atmosphere. <P>COPYRIGHT: (C)2013,JPO&INPIT |