| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable sure measurement of the surface temperature of a treatment target in a laser process. <P>SOLUTION: A temperature measuring device has: a radiation light detector for detecting radiation light occurring from the surface of a treatment target heated by irradiation of a laser beam; a radiation light optical system for leading the radiation light from the surface of the treatment target to the radiation light detector; a reference light source for outputting reference light to be applied to the treatment target heated by the laser beam; a reference light optical system for leading the reference light from the reference light source to the treatment target; a reflection light detector for detecting reflection light of the reference light from the treatment target; a reflection light optical system for leading the reflection light from the treatment target to the reflection light detector; and a controller for receiving the detection results of the radiation light detector and the reflection light detector, determining on the basis of time variation of the intensity of the reflection light a time point at which the surface of the treatment target is melted, setting, to the melting point of the treatment target, the temperature of the surface of the treatment target at which radiation light is generated at the melted time point, converting the intensity of the radiation light to temperature information with the melting point as an absolute value reference temperature, and determining the temperature of the surface of the heated treatment target. <P>COPYRIGHT: (C)2013,JPO&INPIT |
