LASER SYSTEM, LASER LIGHT GENERATION METHOD, AND EXTREME-ULTRAVIOLET LIGHT GENERATION SYSTEM

摘要

PROBLEM TO BE SOLVED: To control the pulse energy of pulse laser light.

SOLUTION: The laser system comprises: a plurality of master oscillators configured to output pulse laser light having different wavelengths; at least one amplifier configured to amplify the pulse laser light; an optical shutter installed on at least any one optical path of the pulse laser light output from the plurality of master oscillators and configured to adjust transmittance of the pulse laser light to be input by the voltage supplied; a power supply configured to supply a voltage to the optical shutter; an optical path adjuster installed on the pulse laser optical path between the optical shutter and the amplifier and configured to match the optical paths of pulse laser light output from the plurality of master oscillators; and a controller configured to adjust the voltage supplied from the power supply to the optical shutter for at least every pulse of the pulse laser light.

COPYRIGHT: (C)2013,JPO&INPIT