| 摘要 |
The present invention relates to a method for preparing nano powder attached to a supporter, the method using a device for preparing nano powder attached to a supporter, and the device comprising: a vacuum evaporation vessel; an agitating vessel provided inside the vacuum evaporation vessel; a screw provided inside the agitating vessel, for agitating a supporter; and an evaporation source provided on the upper portion of the agitating vessel inside the vacuum evaporation vessel, for generating a vapor particle for forming a nano particle, and the method comprising the steps of: a) including an inert gas in the vacuum evaporation vessel so that the degree of vacuum of the vacuum evaporation vessel becomes 10-4-1 torr; b) generating the vapor particle for forming the nano particle using the evaporation source; c) agitating the supporter with the speed of the screw adjusted at 1-200rpm; and d) forming the nano particle by evaporating the vapor particle on the supporter. |
