| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a photodiode array module enabling precise measurement. <P>SOLUTION: This photodiode array module has: a first semiconductor substrate 2 having a first photodiode array reacting to light having a first wavelength band; a second semiconductor substrate 2' having a second photodiode array reacting to light having a second wavelength band; and a third semiconductor substrate 3 on which a plurality of amplifiers AMP are formed, and the first and second semiconductor substrates 2 and 2' are aligned laterally without overlapping with each other, and the respective photodiodes are connected to the amplifiers AMP via bumps. A step part is formed to each adjacent end part of the first semiconductor substrate 2 and the second semiconductor substrate 2'. Thereby, low-noise measurement becomes possible even in the case that respective pixels are aligned continuously over the both substrates. <P>COPYRIGHT: (C)2013,JPO&INPIT |
