| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a thin film element capable of manufacturing the active part of a thin film element by a simple and easy method without requiring a large scale manufacturing apparatus. <P>SOLUTION: The method of manufacturing a thin film element includes steps for forming a first substrate 21 composed of a resin material on a support substrate 20 by an application method, for thereafter forming a second substrate 22 composed of a resin material which cures thermally or by irradiation of an energy beam on the first substrate 21, for subsequently forming the active part 30 of a thin film element on the second substrate, and then for peeling the support substrate 20 from the first substrate 21. Glass-transition temperature of the resin material composing the first substrate 21 is 180°C or higher. <P>COPYRIGHT: (C)2013,JPO&INPIT |
