| 摘要 |
PURPOSE: An apparatus for buffering vibration of a vibration isolation table and a method are provided to maintain the horizontal position in normal state by applying linear load to a support part by using a vibration buffering unit having adjustable height. CONSTITUTION: An apparatus for buffering vibration of a vibration isolation table comprises an air spring, a height adjusting member, and a pneumatic control unit. The air spring controls inner pressure following the degree of freedom of target elements. The air spring is composed of a plurality of elements. The height adjusting member adjusts the height of the air spring and maintains the inner pressure of the air spring in an even state. The pneumatic control unit controls the inner pressure of the air spring and composed to be fit to the degree of freedom of a vibration support. [Reference numerals] (AA) Isolator; (BB) The center of gravity; (CC) Single-degree-of-freedom system; (DD) Air spring; (EE) Unbalanced volume; (FF) Pad possible to regulate height
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