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发明名称
Method for Manufacturing Thin Film Transistor of Poly Silicon having Cu Bottom Gate Structure
摘要
申请公布号
KR101198312(B1)
申请公布日期
2012.11.07
申请号
KR20100103291
申请日期
2010.10.22
申请人
发明人
分类号
H01L29/786;G02F1/136
主分类号
H01L29/786
代理机构
代理人
主权项
地址
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