SUBSTRATE PROCESSING APPARATUS AND METHOD FOR TRANSFERRING SUBSTRATE OF THE SAME,申请号KR20110085546-传众专利搜索

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发明名称	SUBSTRATE PROCESSING APPARATUS AND METHOD FOR TRANSFERRING SUBSTRATE OF THE SAME
摘要
申请公布号	KR101197588(B1)	申请公布日期	2012.11.07
申请号	KR20110085546	申请日期	2011.08.26
申请人		发明人
分类号	H01L21/677;H01L21/02;H01L21/67;H01L21/683	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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