| 摘要 |
The apparatus has a detector unit (16) arranged such that portions of a substrate (10) subsequently become target portions of the exposed substrate. The distance the substrate to be moved is known from the relative positions of the detector unit and a projection system. The detector unit inspects the alignment marks on a given portion of the substrate just before the exposure of the target portion of the substrate. An independent claim is also included for a device manufacturing method. |
