SEMICONDUCTOR FILM AND PHOTOELECTRIC CONVERSION DEVICE

摘要

There is provided a semiconductor film (2) formed on a surface of a substrate (1) and containing a crystalline substance, wherein the semiconductor film (2) has a central region (2b) including a center of a surface of the semiconductor film (2) and a peripheral region (2a) located around the central region (2b), and a crystallization ratio in the peripheral region (2a) of the semiconductor film (2) is higher than a crystallization ratio in the central region (2b). There is also provided a photoelectric conversion device including the semiconductor film (2).