| 摘要 |
PURPOSE: A solar cell and a manufacturing method thereof are provided to reduce manufacturing costs and time by manufacturing the solar cell with a silicon oxide film used as a self-alignment mask. CONSTITUTION: A silicon substrate(102) has a first side and a second side. A first doped area is formed on the first side. The first doped area is doped by a first dopant. A silicon oxide film is formed on the first side. A first thickness of a first silicon oxide film(422) on the first doped area is bigger than a second thickness of a second silicon oxide film(424) on an undoped area of the first side. A second dopant is injected to the first silicon oxide film and the second silicon oxide film. The first silicon oxide film, the second silicon oxide film and the silicon substrate are thermally processed. A second doped area is formed near the first doped area. [Reference numerals] (AA) Boron ion |
