| 摘要 |
PURPOSE: A random copolymer is provided to remarkably improve productivity and processability of a nanopattern substrate by forming a neutral layer by quickly binding with a substrate or particles. CONSTITUTION: A random copolymer comprises a structure indicated in chemical formula 1. R is a phosphonic acid, Me is a methyl group, x is a number of styrenes, and y is a number of methylmethacrylate. The random copolymer has a number average molecular weight(Mn) of about 5,000-20,000, the weight average molecular weight(Mw) is about 5,000-20,000, and polydispersity index is about 1.0-2.0. the number ratio of the x and y is about 40-60 to 60-40. |
