发明名称 Insulated nanogap devices and methods of use thereof
摘要 The present invention provides a method to eliminate undesired parallel conductive paths of nanogap devices for aqueous sensing. The method involves the electrical insulation of an electrode pair, except for the nanogap region wherein electrical response is measured. The magnitude of undesired ionic current in a measurement is reduced by two orders of magnitude. The process to accomplish the present invention is self-aligned and avoids fabrication complexity. The invention has a great potential in nanogap device applications.
申请公布号 US8304273(B2) 申请公布日期 2012.11.06
申请号 US20090864172 申请日期 2009.01.23
申请人 STELLACCI FRANCESCO;BARSOTTI, JR. J ROBERT;HUIJUAN ZHANG;THONG JOHN;MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 STELLACCI FRANCESCO;BARSOTTI, JR. J ROBERT;HUIJUAN ZHANG;THONG JOHN
分类号 H01L21/00;G01N15/06;G01N33/00;G01N33/48 主分类号 H01L21/00
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