发明名称 |
Connecting arrangement for an optical device |
摘要 |
The disclosure relates to a connecting arrangement for an optical device, such as in microlithography. The connecting arrangement includes a first body, a second body and a connecting device. The first body contacts the second body in a laminar manner in a contact region. The connecting device is connected to the second body and contacts the first body via at least one contact unit. The connecting device is configured to generate a predefinable contact force in the contact region between the first body and the second body. The contact unit includes a plurality of separate contact elements. Each contact element is connected to the second body via a spring unit which can be elastically deformed to generate a contribution to the contact force. |
申请公布号 |
US8305701(B2) |
申请公布日期 |
2012.11.06 |
申请号 |
US20090561800 |
申请日期 |
2009.09.17 |
申请人 |
METHE HEIKO;HEINTEL WILLI;LICHT SASCHA;CARL ZEISS SMT GMBH |
发明人 |
METHE HEIKO;HEINTEL WILLI;LICHT SASCHA |
分类号 |
G02B7/02 |
主分类号 |
G02B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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