| 摘要 |
<p>PURPOSE: A heat treatment apparatus for manufacturing a solar cell and the solar cell manufactured thereby are provided to have an even thin film by forming an initial CIGS(Copper Indium Gallium Selenide) thin film through additional gas supply. CONSTITUTION: A chamber body(110) forms an inner space. A substrate fixing unit(120) is installed inside the chamber body. A gas supply unit is arranged on the lower portion of a first substrate side. A fluid path formation part(113) discharges reaction gas to the outside of the chamber body. A heat source unit(10) has a heating source for heating up the substrate.</p> |
