| 摘要 |
PURPOSE: A manufacturing method of a glass substrate for a solar cell is provided to prevent deformation of a glass substrate due to heat by irradiating an amorphous silicon film with electron beams to crystallize the amorphous silicon film to a crystalline silicon film. CONSTITUTION: A cyclopentasilane film dried on a surface of a glass substrate is irradiated with ultraviolet rays. The cyclopentasilane film is converted to an amorphous poly silane film(S13). The amorphous poly silane film and the glass substrate are thermally processed. The amorphous poly silane film is converted to an amorphous silicon film(S14). The amorphous silicon film formed on the surface of the glass substrate is irradiated with electronic beams. The amorphous silicon film is converted to a crystalline silicon film(S15). [Reference numerals] (S11) Cyclopentasilane coating; (S12) Drying a glass substrate; (S13) Ultraviolet ray irradiation; (S14) Heating; (S15) Electron-beam irradiation |
