| 摘要 |
PURPOSE: An apparatus and method for inspecting and sorting a wafer are provided to obtain an inspection result at high speed by inspecting the water in a rotation transfer process between a loading unit and an unloading unit. CONSTITUTION: A loading unit(110) transfers a target wafer to the lower side of a picker(123a,123b). The loading unit includes a tray(111) and a lifting plate(113) which lifts the tray. An inspecting unit inspects the surface of the wafer by rotating the wafer using the picker. An unloading unit(130) is opposite to the loading unit based on a support axis. The unloading unit includes a rail for transferring the wafer with high quality and a rail(132) for transferring the wafer with defects.
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