| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a robot arm type transport apparatus which can appropriately detect a held state of a transport object without causing an increase in the size of an end effector for holding the transport object article, damage to a sensor and deterioration in transport efficiency. <P>SOLUTION: The robot arm type transport apparatus includes: an arm mechanism 2 configured by connecting a plurality of links 21. 22, 23 including a first link 21 for holding a transport object W in such a manner that the links 21. 22, 23 move pivotally in a horizontal plane via joints 24, 25, 26; and a sensor 3 which is attached to, among the plurality of links constituting the arm mechanism 2, the link 22 closer to a proximal end rather than the first link 21 and which detects the presence of the transport object W in a detection position Se defined according to the attached position. The attached position of the sensor 3 is set in such a manner that, when the joint 24 is pivotally driven in a direction in which the first link 21 approaches the link 22 with the sensor 3 attached thereto, the transport object W regularly held by the first link 21 passes through the detection position Se and is detected. <P>COPYRIGHT: (C)2013,JPO&INPIT |
