| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron beam analyzer capable of obtaining an accurate and bright polarized light image. <P>SOLUTION: An electron beam analyzer 1 includes: an electron beam source 20; a light source unit 60 for incident light; a light source unit 80 for transmitting light; image acquiring units 51b, 71, which receive visible light or polarized light incident to a detection surface, and acquire an optical image or a polarized light image in a region including an analyzing position on a sample surface; and a half mirror 92, which reflects visible light from the light source unit 60 for incident light to a predetermined direction and transmits light from the opposite direction to the predetermined direction to lead to the detection surface of the acquiring units 51b, 71. The half mirror 92 is movable in such a manner that, when visible light is emitted from the light source unit 60 for incident light, the half mirror is located at a first position where the half mirror reflects the visible light from the light source unit 60 for incident light to the predetermined direction and transmits light coming from the opposite direction to the predetermined direction to lead to the detection surface of the image acquiring unit 71, and that when polarized light is emitted from the light source unit 80 for transmitting light, the half mirror is located at a second position where light coming from the opposite direction to the predetermined does not pass through. <P>COPYRIGHT: (C)2013,JPO&INPIT |
