发明名称 |
PIEZORESISTIVE PRESSURE SENSOR AND PROCESS FOR PRODUCING A PIEZORESISTIVE PRESSURE SENSOR |
摘要 |
A pressure sensor (1) is provided which has a piezoresistive membrane (2) which can be deformed by the action of the pressure of a medium. The membrane (2) is arranged on a carrier substrate (3) and extends over an opening (32) in the carrier substrate (3). The pressure sensor (1) has a protective layer (4) to protect the membrane (2) from direct contact with a medium. The protective layer (4) covers the membrane (2) both in a first region (28) inside the opening (32) and in a second region (29) outside the opening (32). Furthermore, a process for producing a pressure sensor (1) is provided in which the protective layer (4) forms an etch stop for an etching process. |
申请公布号 |
EP2516980(A1) |
申请公布日期 |
2012.10.31 |
申请号 |
EP20100793223 |
申请日期 |
2010.12.14 |
申请人 |
EPCOS AG |
发明人 |
NOWAK, BIRGIT;OSTRICK, BERNHARD;PESCHKA, ANDREAS |
分类号 |
G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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