| 摘要 |
Disclosed is a cyclic siloxane compound which enables to obtain a positive resist composition having excellent physical properties as a resist. Also disclosed is a positive resist composition using such a cyclic siloxane compound. Specifically disclosed is a cyclic siloxane compound which is obtained by hydrosilylating a compound represented by the general formula (1) below and/or a compound which is obtained by hydrosilylating a compound represented by the general formula (1) below with a divinyl compound represented by the general formula (2) below, with a monovinyl compound represented by the general formula (3) below. (1) CH<SUB>2</SUB>=CH-R<SUP>2</SUP>-CH=CH<SUB>2</SUB> (2) CH<SUB>2</SUB>=CR<SUP>3</SUP>-(R<SUP>4</SUP>)<SUB>h</SUB>-T (3) |
