| 摘要 |
<p>Abstract METHODS AND ARRANGEMENT FOR CREATING MODELS FOR FINE-TUNING RECIPESAn arrangement for creating a model for gathering measurement data about a processed substrate by a user of a plasma processing system is provided. The arrangement includes a generic model builder, which is configured for at least creating the model. The model is a relationship between a set of input data and a set of output data. The arrangement also includes an input module, which includes the set of input data from a plurality of input sources. The arrangement includes an input conditioning and validation module, which is configured for at least determining the integrity- of the set of input data. The arrangement further includes a relationship module, which is configured for at least creating a set of mathematical relationships. The arrangement yet also includes an output conditioning and vatidation module, which is configured for at least determining the integrity of the set of output data.</p> |
