| 摘要 |
PURPOSE: A deposition apparatus using a linear evaporation source is provided to uniformly deposit a sublimate material on a substrate by spraying the sublimate material through a nozzle unit. CONSTITUTION: A deposition apparatus comprises an evaporation source(100), a receiving unit(200) which is formed in the evaporation source to inject a material to be deposited, diffusion units(300) which are connected to the receiving unit and bent multiple times, a nozzle unit(400) which sprays an evaporated material passed through the diffusion unit, a guide unit(500) which is formed at the end of the nozzle unit, and a cover(700) which is coupled to one side of the evaporation source and allowed to open and close.
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