摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron beam excitation type light source device which prevents the deterioration or the damage of a vacuum vessel even though the high optical output and the size reduction are achieved. <P>SOLUTION: An electron beam excitation type light source device includes a vacuum vessel where an electron beam source and a semiconductor light emitting element, excited by an electron beam radiated from the electron beam source and radiating ultraviolet light, are disposed therein. An ultraviolet reflection member is provided on an inner surface of the vacuum vessel. <P>COPYRIGHT: (C)2013,JPO&INPIT |