发明名称 ELECTRON BEAM EXCITATION TYPE LIGHT SOURCE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an electron beam excitation type light source device which prevents the deterioration or the damage of a vacuum vessel even though the high optical output and the size reduction are achieved. <P>SOLUTION: An electron beam excitation type light source device includes a vacuum vessel where an electron beam source and a semiconductor light emitting element, excited by an electron beam radiated from the electron beam source and radiating ultraviolet light, are disposed therein. An ultraviolet reflection member is provided on an inner surface of the vacuum vessel. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012209448(A) 申请公布日期 2012.10.25
申请号 JP20110074489 申请日期 2011.03.30
申请人 USHIO INC 发明人 TAKADA HIROYUKI;MAESO TAKESHI;YAMAGUCHI MASANORI
分类号 H01L33/06 主分类号 H01L33/06
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