| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for making a high-quality epitaxial structure with a simple procedure at a low cost. <P>SOLUTION: The method for making the epitaxial structure comprises a first step to provide a substrate 100 having at least one crystal face, a second step to place a carbon nanotube layer 102 having a plurality of openings on the crystal face 101 of the substrate 100, and expose a part of the crystal face 101 of the substrate 100 through the plural openings of the carbon nanotube layer 102, a third step to grow an epitaxial layer 104 on the crystal face 101 of the substrate 100 and cover the carbon nanotube layer 102, and a fourth step to remove the carbon nanotube layer 102. <P>COPYRIGHT: (C)2013,JPO&INPIT |
