发明名称 ELECTRON MICROSCOPE AND THREE-DIMENSIONAL IMAGE CONSTRUCTION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an electron microscope and a three-dimensional image construction method capable of enhancing the image quality of a three-dimensional image obtained by a CT method. <P>SOLUTION: In the electron microscope 100, an image acquisition unit 24 performs a first processing of acquiring a first inclination image series by acquiring the transmission electron microscope image of a specimen S before a marker is formed at each inclination angle, and a second processing of acquiring a second inclination image series by acquiring the transmission electron microscope image of a specimen on which a marker is formed at each inclination angle. A three-dimensional image construction unit 26 performs alignment processing of aligning a plurality of transmission electron microscope images constituting the first inclination image series based on the second inclination image series, and performs three-dimensional construction processing of the plurality of transmission electron microscope images constituting the first inclination image series thus aligned. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012209050(A) 申请公布日期 2012.10.25
申请号 JP20110072366 申请日期 2011.03.29
申请人 JEOL LTD 发明人 KANEKO TAKESHI
分类号 H01J37/22;H01J37/26 主分类号 H01J37/22
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