| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform three-dimensional shape measurement of an object for measurement to be conveyed at high speed with high accuracy. <P>SOLUTION: A projector 2 projects a slit pattern image in which a plurality of slit patterns coded by light and shade pitches aligned in the Y axis direction are arranged in the X axis direction, and the respective slit patterns are coded so that a value of a bit string when pieces of bit data with the same Y position are extracted from the respective slit patterns to be aligned along the X axis direction linearly varies along the Y axis direction on a conveyance path of an object M. An imaging apparatus 3 picks up a state that the object M is conveyed in the X axis direction and passes through the slit pattern image from an angle different from that of the projector 2. A code generation part 6 codes light and shade when a position of a measuring object on the object M reaches the respective slit patterns based on a picked up moving image. A height calculation part 7 calculates height of a position of the measuring object based on a coded code. <P>COPYRIGHT: (C)2013,JPO&INPIT |
