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发明名称
LASER SCANNING METHOD FOR ANNEALING GLASS FLOW AND RELATED PROCESSES
摘要
申请公布号
EP0061951(A3)
申请公布日期
1983.09.07
申请号
EP19820400445
申请日期
1982.03.12
申请人
FAIRCHILD CAMERA & INSTRUMENT CORPORATION
发明人
DELFINO, MICHELANGELO;REIFSTECK, TIMOTHY
分类号
H01L21/20;H01L21/268;H01L21/31;H01L21/3105;(IPC1-7):H01L21/26
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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