| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent loss of light when coupling the light to a waveguide. <P>SOLUTION: An optical device includes: a substrate 12; a clad layer 14 formed on an upper surface 12a of the substrate 12; an optical waveguide 16 formed on an upper surface 14a of the clad layer 14 and including a grating 16c for optical input; an overclad layer 18 covering the optical waveguide 16 and formed on the upper surface 14a of the clad layer 14; and a reflection film 20 formed at a portion corresponding to the grating 16c on an upper surface 18a of the overclad layer 18. An anti-reflection film 22 is formed at a portion corresponding to the grating 16c on a lower surface 14b of the clad layer 14, and a pore 24 exposing the anti-reflection film 22 is formed in the substrate 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
