| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent an adhesive that gradually comes up to a surface of a piezoelectric actuator from reaching a portion that overlaps an individual electrode, and to reduce warpage of the piezoelectric actuator. <P>SOLUTION: In manufacturing the piezoelectric actuator, a plurality of surface electrodes 45 are formed between an edge of a piezoelectric layer 42 and a portion opposed to the individual electrode 43 on an upper surface 42A of the piezoelectric layer 42. A plurality of surface electrode trains 47 formed by arranging a plurality of surface electrodes along the edge of the piezoelectric layer 42 are formed in a direction of separating from the edge of the piezoelectric layer, and the plurality of surface electrodes 45 are formed so that gaps 48 between the surface electrodes 45 are displaced from each other in the adjacent surface electrode trains 47. By layering a flow passage unit and the piezoelectric actuator and pressing the upper surface 42A of the piezoelectric layer 42 toward the flow passage unit by a heater having a flat pressing surface, the flow passage unit and the piezoelectric actuator are bonded with the adhesive. <P>COPYRIGHT: (C)2013,JPO&INPIT |
