| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device, method, and program for defect detection, in which exact inspection can be performed in a short time. <P>SOLUTION: The defect defection device includes: an image acquisition device 10 in which, by giving electrical charge to a sample 30 having wiring, an image of changing brightness in response to the given electrical charge is acquired in different positions in the wiring direction of the sample 30; a discontinuous point specifying part 23 which obtains the positions of the discontinuous points of the brightness corresponding to a defective place from the image of the sample; and a determination part 24 which determines whether or not a defect exists between places where a plurality of sheets of images are acquired, as compared with the positions of the discontinuous points of the brightness in the plurality of sheets of the images of the sample. <P>COPYRIGHT: (C)2013,JPO&INPIT |
