发明名称 METHOD OF COATING A SUBSTRATE
摘要 The present invention provides a method of coating a substrate with a zinc oxide film, the method comprising the steps of: Providing a substrate with at least one substantially flat surface; Subjecting said surface at least partially to a plasma-etching process; Depositing a layer on said etched surface, the layer comprising zinc oxide. The method according to the invention is particularly suitable for manufacturing solar cells with an improved efficiency.
申请公布号 US2012266953(A1) 申请公布日期 2012.10.25
申请号 US201013500565 申请日期 2010.09.27
申请人 BORRELLO DANIEL;VALLAT-SAUVAIN EVELYNE;KROLL ULRICH;MEIER JOHANNES;OERLIKON SOLAR AG TRUBBACH 发明人 BORRELLO DANIEL;VALLAT-SAUVAIN EVELYNE;KROLL ULRICH;MEIER JOHANNES
分类号 H01L31/18;H01L31/0224 主分类号 H01L31/18
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