发明名称 |
METHOD OF COATING A SUBSTRATE |
摘要 |
The present invention provides a method of coating a substrate with a zinc oxide film, the method comprising the steps of: Providing a substrate with at least one substantially flat surface; Subjecting said surface at least partially to a plasma-etching process; Depositing a layer on said etched surface, the layer comprising zinc oxide. The method according to the invention is particularly suitable for manufacturing solar cells with an improved efficiency.
|
申请公布号 |
US2012266953(A1) |
申请公布日期 |
2012.10.25 |
申请号 |
US201013500565 |
申请日期 |
2010.09.27 |
申请人 |
BORRELLO DANIEL;VALLAT-SAUVAIN EVELYNE;KROLL ULRICH;MEIER JOHANNES;OERLIKON SOLAR AG TRUBBACH |
发明人 |
BORRELLO DANIEL;VALLAT-SAUVAIN EVELYNE;KROLL ULRICH;MEIER JOHANNES |
分类号 |
H01L31/18;H01L31/0224 |
主分类号 |
H01L31/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|